M.M. Kharkov1,2, G.I. Rykunov1, A.V. Kaziev1, M.S. Kukushkina1, D.V. Kolodko1,3, M.V. Prozhega4, E.O. Reschikov4, I.S. Babinets4,5, P.P. Beschapov4,5, A.M. Stasenko4,5, S.V. Chernyshov4,5, D.E. Arkhipov6
1) National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), 31 Kashirskoe shosse, 115409 Moscow, Russia
2) A.A. Bochvar High-Technology Scientific Research Institute for Inorganic Materials, 5a Rogov str., 123098 Moscow, Russia
3) Kotelnikov Institute of Radio Engineering and Electronics, RAS, 1 Vvedeskogo sq.,141190 Fryazino, Moscow Region, Russia
4) Blagonravov Institute of Machine Science, RAS, 4 Maliy Kharetonovski per., 101990 Moscow, Russia
5) Bauman Moscow State Technical University, 5b1 Second Bauman str. 105005 Moscow, Russia
6) A.N. Nesmeyanov Institute of Organoelement Compounds, RAS, 23 Vavilov str. 119991 Moscow, Russia
The composition and parameters of magnetron plasma have been examined for the case of MoS2 target sputtered in argon. In experiments, the magnetron discharge was operated in DC and pulsed modes with f = 1–100 kHz repetition rate. Density and temperature of electrons were measured with a Langmuir probe. Coating thickness was measured with a surface profiler after the deposition. Coating density was evaluated by a weighing method. Phase composition of coatings deposited in different regimes was determined by XRD. The adhesive properties of films was measured with a scratch tester. MoS2 coatings deposited on AISI316L steel and CuAl9NiFe4Mn1 bronze samples with different surface roughness underwent tribological tests in vacuum, at 250°С temperature, with a 3-mm-radius indenter. Friction and wear tests were produced with the track length equal to 1 km.